thermally
A new platform for thermally stable DRAM peripheral transistors
Dynamic random-access memory (DRAM) chips contain many other transistors besides the access transistor to enable full operation of the DRAM memory. These peripheral transistors must meet stringent requirements which preclude a ‘copy-paste’ of regular logic transistor process flows. One critical requirement imposed by present DRAM chip architectures is the ability of the periphery to withstand…