Intel has championed High-NA EUV chipmaking tools, but costs and other limitations could delay industry-wide adoption: Report

Intel has championed High-NA EUV chipmaking tools, but costs and other limitations could delay industry-wide adoption: Report

Intel has made significant strides in implementing High-NA EUV lithography by installing two High-NA litho machines, developing custom reticles as well as all-new optical proximity correction, and processing 30,000 wafers. However, major hurdles remain: the $380 million – $400 million tool cost and potential necessity to overhaul photomask supply chain limits economic viability of the…

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